Design and testing of a new type of DBD flow reactors for combinatorial plasma treatment and deposition at atmospheric pressure
نویسندگان
چکیده
Development und experimental testing of a new kind of dielectric barrier discharge flow reactors applicable for plasma-assisted chemical vapor deposition as well as surface treatment processes at atmospheric pressure are described. Using a combination of two upstream modules, a gradient mixer and a homogenizer, the reactor is fed by a laminar gas flow with an established concentration gradient transversal to the direction of flow. This new reactor type is tested using PACVD of hexamethyldisiloxane, tetramethylsilane, and glycidyl methacrylate, plasma (co)polymerization of unsaturated trans-2-hexenal with 4-methylstyrene and plasma (co)polymerization of glycidyl methacrylate with styrene, respectively.
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